Ion Implanter Ion Beam Vacuum Vacuum Vacuum Vacuum RF Beam Beam Beam RF Vacuum RF RF Beam Beam Beam RF Source Beam Beam Vacuum Beam Beam Beam Faraday Faraday Faraday Beam Beam Magnet Beam Magnet Neutral Neutral Beam BF3 RF Beam Vacuum Vacuum Magnet Beam Magnet Magnet Vacuum Beam Faraday The Ion Implanter Clickable Map