Circuit Diagram of
a RF matching network designed to convert the complex impedance of a plasma
at 13.56 MHz to a 50-Ohm resistive load for the generator. The following
is a list of circuit components.
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G1 13.56MHz RF Generator delivers up to 3000 Watts into a 50-W , non-reactive load. It uses a 3 phase, 208 Vac, 50/60 Hz power source, is water-cooled, and provides control signals through a 25-pin analog/digital user port.
C1, C2 Variable Vacuum Capacitors have a range of from 7 to 1000 picofarads, and a working voltage of 5 kilovolts.
T1 In the above circuit diagram, primary windings are show in black and secondary windings are red. The actual turn ratio may depend on several factors, coil length, capacitor values, source pressure range, ect.
L1 The water cooled (RF) coil, or antenna, couples the FM-band RF (13.56MHz) into a plasma contained within the ion source. It is supported by the base and has a metallic segment mounted directly within the gas confinement chamber to deliver ionizing energy into the gas ionization zone. United States Patent 5,661,308
Plasma A fourth state of matter -- not a solid, liquid or gas. In a plasma, the electrons are pulled free from the atoms and can move independently. The individual atoms are charged, even though the total number of positive and negative charges is equal, maintaining an overall electrical neutrality.
RF Links...
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This page is sponsored by Case Technology Inc. since 5/1/98.
Updated 6/6/99.
