The Vacuum System

 
Vacuum System Mass Flow Control  Gas Bypass Valve Gas Purge ValveGas Purge ValvePressure RegulatorGas Bypass Valve Cryo Pump Isolation Valve Cryo Compressor Dry Roughing Pump  Dry Roughing Pump  Turbo Roughing Valve Turbo Roughing Valve Cryo Pump Isolation ValveProcess Chamber Cryo Pump Isolation Valve Process Chamber Isolation Valve Beamline Housing Source Housing 2000 Liter/sec. Turbomolecular Pump 2000 Liter/sec. Turbomolecular PumpGas Delivery SystemGas Delivery System Gas Flow Valve Gas Flow ValveGas Flow Valve Source Isolation ValveHot Cathode Ion GageHot Cathode Ion GageHot Cathode Ion GagePressure RegulatorMass Flow Control
 The ion implanter requires a high vacuum system seen here in a block diagram in order to generate a plasma and transport an ion beam from the ion source through the analyzer magent to the process chamber.
 
 
 
 Introduction
The Ion Implanter
The Vacuum system 
The Ion Source 
The Ion Beam
 Glossary
The Faraday 
Matching Network
The Magnet 
Boron Trifluoride
Charge Neutralization
 References
 
 
 

 

High Vacuum Pumps
 
 
Turbomolecular Pumps

 

 

Cryo Pumps

Cryo Pumps

 

 

 

SHI-APD Cryogenics Inc

MARATHON®  cryopumps

CTI-CRYOGENICS

       

       

 


Cryo Pumps Controller




 
 
 

 

                   

 

Dry Roughing Pumps

 

 

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Gas Delivery System

 

BF3

BF3 Matheson Gas Products
BOC Gases
Scott Gases
Institute of Gas Technology
Voltaix, Inc.
More on BF3
 

 

Mass Flow Control

Dry Roughing Pumps

 
 

 
 

 

 

Pressure Regulator
Pressure Regulator

 
 

 

 

 

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Valves

VAT Valves
VAT Valves

 

 

 

 


 

 Measurement Systems
 Measurement Systems

 

 

 
 

 

 

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Complete Vacuum System

 

 

 

 

 

 

 Introduction
The Ion Implanter
The Vacuum system 
The Ion Source 
The Ion Beam
 Glossary
The Faraday 
Matching Network
The Magnet 
Boron Trifluoride
Charge Neutralization
 References
 
 


 
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This page is sponsored by Case Technology Inc. since 5/1/98.

Updated 6/6/99.