The Vacuum System
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 The ion implanter requires a high vacuum system seen here in a block diagram in order to generate a plasma and transport an ion beam from the ion source through the analyzer magent to the process chamber.
 
 
 
 Introduction
The Ion Implanter
The Vacuum system 
The Ion Source 
The Ion Beam
 Glossary
The Faraday 
Matching Network
The Magnet 
Boron Trifluoride
Charge Neutralization
 References
 
 
 

 

High Vacuum Pumps
 
 
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Cryo Pumps

 

 

 

SHI-APD Cryogenics Inc

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Dry Roughing Pumps

 

 

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Gas Delivery System

 

BF3

Matheson Gas Products
BOC Gases
Scott Gases
Institute of Gas Technology
Voltaix, Inc.
More on BF3
 

 

 Mass Flow Control

 
 
 
 

 

 

Pressure Regulator

 
 

 

 

 

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Valves


VAT Valves

 

 

 

 


 

 Measurement Systems

 
 

 

 

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Vacuum Links

Scientific Equipment 

 

 

 Introduction
The Ion Implanter
The Vacuum system 
The Ion Source 
The Ion Beam
 Glossary
The Faraday 
Matching Network
The Magnet 
Boron Trifluoride
Charge Neutralization
 References
 
 


mike@casetechnology.com
 
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This page is sponsored by Case Technology Inc. since 5/1/98.

Updated 6/6/99.