The Vacuum System
 Mass Flow Control Gas Bypass Valve Gas Purge ValveGas Purge ValvePressure RegulatorGas Bypass Valve Cryo Pump Isolation Valve Cryo Compressor Dry Roughing Pump Dry Roughing Pump Turbo Roughing Valve Turbo Roughing Valve Cryo Pump Isolation ValveProcess Chamber Cryo Pump Isolation Valve Process Chamber Isolation Valve Beamline Housing Source Housing 2000 Liter/sec. Turbomolecular Pump 2000 Liter/sec. Turbomolecular PumpGas Delivery SystemGas Delivery System Gas Flow Valve Gas Flow ValveGas Flow Valve Source Isolation ValveHot Cathode Ion GageHot Cathode Ion GageHot Cathode Ion GagePressure RegulatorMass Flow Control
 The ion implanter requires a high vacuum system seen here in a block diagram in order to generate a plasma and transport an ion beam from the ion source through the analyzer magent to the process chamber.
 
 
 
 Introduction
The Ion Implanter
The Vacuum system 
The Ion Source 
The Ion Beam
 Glossary
The Faraday 
Matching Network
The Magnet 
Boron Trifluoride
Charge Neutralization
 References
 
 
 

 

High Vacuum Pumps
 
 
Turbomolecular Pumps

 

 

Cryo Pumps

 

 

 

SHI-APD Cryogenics Inc

MARATHON®  cryopumps

CTI-CRYOGENICS

       

       

 





 
 
 

 

                   

 

Dry Roughing Pumps

 

 

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Gas Delivery System

 

BF3

Matheson Gas Products
BOC Gases
Scott Gases
Institute of Gas Technology
Voltaix, Inc.
More on BF3
 

 

 Mass Flow Control

 
 

 
 

 

 

Pressure Regulator

 
 

 

 

 

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Valves


VAT Valves

 

 

 

 


 

 Measurement Systems

 

 

 
 

 

 

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 Introduction
The Ion Implanter
The Vacuum system 
The Ion Source 
The Ion Beam
 Glossary
The Faraday 
Matching Network
The Magnet 
Boron Trifluoride
Charge Neutralization
 References
 
 

 
 Top of Page Top of Page
 
This page is sponsored by Case Technology Inc. since 5/1/98.

Updated 6/6/99.